Optional Add-On Toolboxes:

SuMMIT Developer's Kit: Metrology automation needs can be quite varied. Thus, the optional SuMMIT Developer's Kit, adds a scripting language capability as well as a Server mode which allows SuMMIT to actively monitor a directory for an updated SuMMIT Script file and will execute the Script when it appears. This allows the user to effectively integrate SuMMIT processing capabilities within their own programs or scripts using any programming scripting language they desire. The Developers Kit also includes access to an Image Processing Server Mode which allows SuMMIT to monitor a selected directory for new image files to appear and process those files saving the results in a batch output file.

SuMMIT Contact Analysis/2D Toolbox adds contact metrology capabilities to SuMMIT. The capabilities include autofencing for contacts and a variety of contact-specific metrics in addition to conventional LER metrics where instead of comparing the edge to a line, it is compared to some reference shape such as a circle or ellipse. Full control over the contact analysis recipe is provided through an additional tab in the SuMMIT recipe tool. The contact analysis features include an advanced contact metric window which reports individual and average values for diameter, major and minor diameters, orientation, perimeter, area, circularity, and eccentricity. In addition the the advanced contact metric window, this toolbox also provides a new contact-metric plot tool that allows the user to select both the plot type as well as the specific metric to plot. The recipe control includes mechanisms to remove systematic effects from the contact roughness, due for example to assymetry in the contact or squarish corners.

Included with the Contact Analysis/CD toolbox, is the Multi ROI  tool  allowing SuMMIT to be operated in multiple ROI mode.  This mode works  with both lines and contacts allowing the user to select multiple descrete regions for simultaneous analysis. The regions need not be the same size and both horizontal and vertical features can be simultaneously analyzed. This toolkit is also compatible with contact analysis mode and includes an ROI array generator tool enalbing easy defining of a grid of ROIs with arbitrary spacing, size, stagger, and offset.

SuMMIT Stochastic LER Modeling Toolbox adds LER modeling capabilities to SuMMIT. Load an aerial image into SuMMIT, define the resist parameters, and SuMMIT will compute the deprotection image including LER. At this point, SuMMIT's exhaustive LER analysis capabilities can be applied to the modeled deprotection image.

SuMMIT Process Window Analysis Toolbox adds process window computation capabilities to SuMMIT. This provides a convenient, high performance alternative to high-priced lithographic data analysis packages. This toolbox also easily integrates with SuMMIT batch analysis through the use of SuMMIT process-window batch files. Process-window batch input files an be easily generated simply by adding corresponding dose and focus information to each line of the batch file. When such a batch is run, additional process-window output files are created during batch excecution which can be directly loaded into the process-window analysis toolbox.

SuMMIT Surface Analysis Toolbox adds surface PSD and Flare analysis capabilities to SuMMIT making SuMMIT relevant for system metrology as well as resist metrology. This toolbox enables detrending of surface data, the computation of 2D and isotropic PSDs, and the prediction of flare as a function of feature size and field size for cases where the surface data of interest represents an optical surface.

System Requirements:

SuMMIT:

• Computer: Window-compatible PC with Windows 2000 or newer
• Hard Drive: 100 Meg free space
• RAM: 128 Meg or more
• Display: 1024x768 resolution or higher

Purchasing SuMMIT: SuMMIT can be downloaded using the link on our support page, however, in order to install and run the program, license data is required. Please contact our sales department for a quote and delivery of a license file.

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