Contact Analysis Toolbox: With the contact analysis toolbox, SuMMIT can be used to characterize contact holes and post. The toolbox provides a custom recipe area for contacts and provides a variety of contact metrics in addition to roughness numbers. These metrics include diameter, major and minor axis widths, orientation, perimeter, area, circularity, and eccetricity. The values are presented through the Advanced Contact Results window which shows both average results for a field of contacts and specific results for each analyzed contact. The toolbox also includes the Contact Metric Plot tool which allows the above metrics to be visualized in a variety of ways.

The toolbox also supports all the LER analysis comparing the contact edge to some reference shape. At this point circle and elliptical reference shapes are supported enabling oblong contacts to be analyzed. The toolbox also includes post-processing capabilities enabling systematic harmonic errors to be removed from the line-edge data enabling, for example, the analysis of such features as slots, square contacts, and triangular contacts.

Home | Products | Contact | Support

Graphics by Art for the web