Multi ROI Toolkit: The contact analysis toolbox also comes packaged with the Multi ROI Toolkit. With this toolkit multiple regions of interest can be defined for analysis at the same time. The multi ROI toolkit works with both line analysis as shown below and with the Contact hole toolbox. When dealing with lines, the toolkit can simultaneously handle regions with horizontal and vertical features as shown in the example below. Once analyzed, the regions can be analyzed using all the customary SuMMIT tools including detailed spatial and spectral analysis of LER/LWR as well as Interline Variation Plot tool. The multi ROI toolkit also works in conjunction with the pattern recognition capabilities provided as part of the SuMMIT base package.

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