SuMMIT Process Window Analysis Toolbox

 

Process Window Anslysis Toolbox: With the process-window analysis toolbox you can quickly turn your batch output data into meaningful process windows. The toolbox provides all the use visulaization plots such as Bossung, process map, and exposure latitude versus depth of focus. Process windows can be determined based on CD or LER data and tools are provided for interactive editing of the data points from the Bossung plot.

The SuMMIT Process Window analysis toolbox can also easily handle with non-SuMMIT data since it uses simple text based input files.



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