Stochastic LER Modeling Toolbox: With this toolbox any aerial image can be converted to a deprotection image with LER. The resist parameters of interest are defined by the user and SuMMIT computes the deprotection image including effects of shot noise, deprotection blur, saturation effects, ... Once the deprotection image is computed all of SuMMIT's LER analysis tools can be applied or the image can be exported.

 Aerial image generate by Prolith and imported into SuMMIT

 Interface to define resist and aerial image dose parameters.

  Computed stochastic deprotection image 

LER analysis of the computed deprotection image.

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