What is SuMMIT? SuMMIT is an interactive off-line analysis package for critical dimension (CD) and line-edge/width roughness (LER/LWR) processing of SEM images. This feature-rich analysis program integrates a variety of visualization tools and numerous built-in processing algorithms into a user-friendly GUI. SuMMIT is also capable of performing large unattended batch tasks, allowing large volumes of data to be analyzed quickly. A comprehensive description of SuMMIT capabilities can be found at the SuMMIT online documentation section on our support page.

Why SuMMIT? As critical dimensions are pushed ever smaller, LER and LWR become of increasing concern. The task of understanding and minimizing line-edge roughness requires repeatable, accurate, and insightful characterization of the properties of this roughness. The SuMMIT software package has been written exclusively to facilitate this task. Going much further beyond the conventional characterization of LER as a single 3-sigma deviation number, SuMMIT provides a wealth of integrated spectral analysis and visualizations techniques. SuMMIT allows for exporting of detailed analysis results to CSV and Matlab files for further manipulation, comparison, and display. SuMMIT supports batch processing of large volumes of data, enabling applications such as large parametric studies, large sample studies for the generation of statistically significant results, and LER-based process-window studies. Finally, SuMMIT includes scripting capabilities that enable most program operations to be automated. Scripts can also be run from the command line, allowing SuMMIT calculations to be readily integrated into a larger measurement stream.

SuMMIT was designed with flexibility and automation in mind and has had the benefit of 4 years of real-world use in various organizations. Not all algorithms are optimal for all SEM images, thus SuMMIT provides a myriad of algorithms to choose from, allowing the user to tune both the automated line-finding algorithms as well as the edge-detection and LER calculation algorithms. Additionally, with the optional Developer's Kit, the user can customize SuMMIT to meet even more specific metrology needs. Because measurement consistency is of utmost importance, SuMMIT includes a recipe tool that facilitates the definition, storage, and distribution of metrology recipes.

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